Yamaguchi A. Nano-Microsystems. Science and applications 2025

Textbook in PDF format

The nano-microsystem offers a precise experimental platform through semiconductor microfabrication and automated measurement control. It supports both scientific research and engineering applications, enabling the development of practical, real-world devices.
This book serves as a comprehensive guide to utilising nano-microsystems, covering key concepts, policies, fabrication techniques, and implementation examples. It introduces microfluidic systems, detailing their principles, design, and construction methods. Aimed at scientists who have struggled to construct experimental systems systematically when conducting scientific experiments, and for engineers seeking applied research. Additionally, the book provides novice students with information on nano-microsystems that will be useful for their own research