Shinohara S. High-Density Helicon Plasma Science. From Basics to Apps 2023

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Shinohara S. High-Density Helicon Plasma Science. From Basics to Apps 2023

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Textbook in PDF format Plasma exhibits many interesting phenomena from earth to space in an unusually wide range of density and temperature parameters. Often, drastic changes in structural formation can be attributed to inherent nonlinear behaviors, and therefore, several practical applications based on fundamental understandings have been accomplished. From the end of the 20th century, remarkable progress has been witnessed in plasma science, and this has contributed to enriching our daily lives. To this end, the development of plasma sources is crucial for further advanced studies and applications. The helicon wave plasma source is a promising candidate among the many developed sources of plasma. The helicon source has attracted considerable research attention, and several research studies focused on the funda mental to industrial application fields have been conducted; this is because we can easily achieve a high electron density (~ 1013 cm−3) with flexible external operation parameters. A helicon wave can be excited in a radio frequency region in the presence of external magnetic fields under a relatively low fill gas pressure. Although this advantage of helicon plasmas is well-recognized, to the best of my knowledge, there are no book that have studied helicon plasma science in a unified manner, despite some review papers published, including ours. In this book, bearing the contemporary helicon plasma advancements, I attempted to survey the up-to-date results over a wide area of basic understandings and appli cations, including our research, which exhibited a mixed feature of a textbook, specialized book, and monograph. Introduction Fundamentals of Plasma and Its Diagnostics Basic Helicon Wave Plasma Extensive Helicon Plasma Science Summary and Future Aspect