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Hilleringmann U. Silicon Semiconductor Technology. Processing...Devices 2023

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Hilleringmann U. Silicon Semiconductor Technology. Processing...Devices 2023

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Category: Other
Total size: 9.07 MB
Added: 2025-03-10 23:38:51

Share ratio: 2 seeders, 2 leechers
Info Hash: E872E704EF2BDE824E28C39BFF1AE23FAFC46953
Last updated: 5.3 hours ago

Description:

Textbook in PDF format The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FinFET structures. All processes are presented looking from the process engineer’s view. About the Author: Prof. Dr.-Ing. Ulrich Hilleringmann has been teaching semiconductor technology, microelectromechanical systems, sensor technology and optoelectronic system integration since 1989