Baglio S. Scaling Issues and Design of MEMS 2007

Textbook in PDF format

The concept of scaling is fundamental in engineering design. This book deals with the main issues in designing microelectromechanical systems (MEMS), taking into account the scaling item. This text includes a wide view of various types of MEMS. Moreover, the very important theme of energy supplies in MEMS has been accurately faced. Details of the design of complete MEMS are also reported, referring to the case of colonies of microrobots. The book explores both theoretical aspects of MEMS models and experimental prototype validation. Analytical, numerical and experimental tools are widely discussed in order to give to the reader a completely clear view in understanding the main topics: to design by using ‘scaling’ techniques.
The topics discussed are related to the long experience of the authors in designing and in the realization of MEMS devices; the reported study is, in my opinion, at the top level in the considered area of research, moreover it establishes powerful tools to conceive emerging MEMS