Radamson H., Wang G. Silicon Nanodevices 2022

Textbook in PDF format

Silicon nanodevices is a hot topic in the current technology. The start of Moore’s law and the following of technology roadmap to scale down the transistors is one of the most important objectives in the semiconductor industry. As our research is proceeding towards to the unknown frontiers, the boundary in different parts of science is emerging together. Therefore, we have chosen a series of research articles in electronics and photonics to highlight the material synthesis and device manufacturing.
The editors would like to acknowledge valuable discussions with and material from all the authors and the valuable supports and help from Guangdong Greater Bay Area Institute of Integrated Circuit and System, Beijing Superstring Academy of Memory Technology, Institute of Microelectronics, Chinese Academy of Sciences